diff --git a/java/droiddoc.go b/java/droiddoc.go
index f0decec..da13c62 100644
--- a/java/droiddoc.go
+++ b/java/droiddoc.go
@@ -812,7 +812,7 @@
 		BuiltTool("soong_javac_wrapper").Tool(config.JavadocCmd(ctx)).
 		Flag(config.JavacVmFlags).
 		FlagWithArg("-encoding ", "UTF-8").
-		FlagWithRspFileInputList("@", srcs).
+		FlagWithRspFileInputList("@", android.PathForModuleOut(ctx, "javadoc.rsp"), srcs).
 		FlagWithInput("@", srcJarList)
 
 	// TODO(ccross): Remove this if- statement once we finish migration for all Doclava
@@ -1243,7 +1243,7 @@
 		Flag("-J--add-opens=java.base/java.util=ALL-UNNAMED").
 		FlagWithArg("-encoding ", "UTF-8").
 		FlagWithArg("-source ", javaVersion.String()).
-		FlagWithRspFileInputList("@", srcs).
+		FlagWithRspFileInputList("@", android.PathForModuleOut(ctx, "metalava.rsp"), srcs).
 		FlagWithInput("@", srcJarList)
 
 	if javaHome := ctx.Config().Getenv("ANDROID_JAVA_HOME"); javaHome != "" {
@@ -1446,7 +1446,9 @@
 	// add a large number of inputs to a file without exceeding bash command length limits (which
 	// would happen if we use the WriteFile rule). The cp is needed because RuleBuilder sets the
 	// rsp file to be ${output}.rsp.
-	impCmd.Text("cp").FlagWithRspFileInputList("", cmd.GetImplicits()).Output(implicitsRsp)
+	impCmd.Text("cp").
+		FlagWithRspFileInputList("", android.PathForModuleOut(ctx, "metalava-implicits.rsp"), cmd.GetImplicits()).
+		Output(implicitsRsp)
 	impRule.Build("implicitsGen", "implicits generation")
 	cmd.Implicit(implicitsRsp)
 
@@ -1750,7 +1752,7 @@
 		Flag("-jar").
 		FlagWithOutput("-o ", p.stubsSrcJar).
 		FlagWithArg("-C ", srcDir.String()).
-		FlagWithRspFileInputList("-r ", srcPaths)
+		FlagWithRspFileInputList("-r ", p.stubsSrcJar.ReplaceExtension(ctx, "rsp"), srcPaths)
 
 	rule.Restat()
 
diff --git a/java/kotlin.go b/java/kotlin.go
index 8067ad5..2960f81 100644
--- a/java/kotlin.go
+++ b/java/kotlin.go
@@ -64,7 +64,9 @@
 		// Insert a second rule to write out the list of resources to a file.
 		commonSrcsList := android.PathForModuleOut(ctx, "kotlinc_common_srcs.list")
 		rule := android.NewRuleBuilder(pctx, ctx)
-		rule.Command().Text("cp").FlagWithRspFileInputList("", commonSrcFiles).Output(commonSrcsList)
+		rule.Command().Text("cp").
+			FlagWithRspFileInputList("", commonSrcsList.ReplaceExtension(ctx, "rsp"), commonSrcFiles).
+			Output(commonSrcsList)
 		rule.Build("kotlin_common_srcs_list", "kotlin common_srcs list")
 		return android.OptionalPathForPath(commonSrcsList)
 	}
diff --git a/java/lint.go b/java/lint.go
index 9f677db..fccd1a5 100644
--- a/java/lint.go
+++ b/java/lint.go
@@ -220,7 +220,9 @@
 		// Insert a second rule to write out the list of resources to a file.
 		resourcesList = android.PathForModuleOut(ctx, "lint", "resources.list")
 		resListRule := android.NewRuleBuilder(pctx, ctx)
-		resListRule.Command().Text("cp").FlagWithRspFileInputList("", l.resources).Output(resourcesList)
+		resListRule.Command().Text("cp").
+			FlagWithRspFileInputList("", resourcesList.ReplaceExtension(ctx, "rsp"), l.resources).
+			Output(resourcesList)
 		resListRule.Build("lint_resources_list", "lint resources list")
 		trackRSPDependency(l.resources, resourcesList)
 	}
@@ -241,7 +243,10 @@
 	// TODO(ccross): some of the files in l.srcs are generated sources and should be passed to
 	// lint separately.
 	srcsList := android.PathForModuleOut(ctx, "lint", "srcs.list")
-	rule.Command().Text("cp").FlagWithRspFileInputList("", l.srcs).Output(srcsList)
+	srcsListRsp := android.PathForModuleOut(ctx, "lint-srcs.list.rsp")
+	rule.Command().Text("cp").
+		FlagWithRspFileInputList("", srcsListRsp, l.srcs).
+		Output(srcsList)
 	trackRSPDependency(l.srcs, srcsList)
 
 	cmd := rule.Command().
@@ -635,7 +640,7 @@
 	rule.Command().BuiltTool("soong_zip").
 		FlagWithOutput("-o ", outputPath).
 		FlagWithArg("-C ", android.PathForIntermediates(ctx).String()).
-		FlagWithRspFileInputList("-r ", paths)
+		FlagWithRspFileInputList("-r ", outputPath.ReplaceExtension(ctx, "rsp"), paths)
 
 	rule.Build(outputPath.Base(), outputPath.Base())
 }